Plasma etcher, Capacity: 10 panels, max. panel size: 500 x 610 mm, volume: 3.0 m3, 4 gas chambers. Chamber dimensions: 1100 x 1250 x 2050 mm, switch cabinet dimensions: 800 x 600 x 2000 mm, Cage dimensions: 750 x 650 x 660 mm. Electrical connections: 220 / 380 V - 3 x 20 A - 3 Ph.  Including one NEW spare cage en one NEW vacuum pump. Year: 1992. Connected to power and can be demonstrated.