Plasma etcher, suitable for 16 panels, panel dimensions: 457 x 610 mm. door opening (L x H): 712 x 1067 mm, inner chamber dimensions (L x W x H): 712 x 1067 x 1220 mm,  gas-inlets for 5 gases, overall machine dimensions (L x W x H): 2200 x 1320 x 2030 mm. Electrical connections: 208 V - 50 / 60 Hz - 3 Ph - 43 A. Ready for acceptance demo. Year: 2011.