Plasma etcher, suitable for 16 panels, panel dimensions: 457x610mm (18"x24")/ or 8 panels 670x1066mm (26"x42") due to extended electrodes. 2 cages and 2 carts, door opening (L x H): 712 x 1067 mm, inner chamber dimensions (L x W x H): 712 x 1067 x 1220 mm,  gas-inlets for 5 gases, overall machine dimensions (L x W x H): 2200 x 1320 x 2030 mm. Electrical connections: 208 V - 50 / 60 Hz - 3 Ph - 43 A. Ready for acceptance demo. Year: 2011.